Anomalous behaviors of plasma parameters in unbalanced...

Anomalous behaviors of plasma parameters in unbalanced direct-current magnetron discharge

Seo, Sang-Hun, Chang, Hong-Young
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Volume:
11
Year:
2004
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.1759629
File:
PDF, 535 KB
english, 2004
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