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Impact of fluence-rate related effects on the sputtering of silicon at elevated target temperatures
Lugstein, A., Steiger-Thirsfeld, A., Basnar, B., Hyun, Y. J., Pongratz, P., Bertagnolli, E.Volume:
105
Year:
2009
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3078805
File:
PDF, 470 KB
english, 2009