Isothermal stress relaxation in electroplated Cu films. I....

Isothermal stress relaxation in electroplated Cu films. I. Mass transport measurements

Gan, Dongwen, Ho, Paul S., Huang, Rui, Leu, Jihperng, Maiz, Jose, Scherban, Tracey
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1904720
File:
PDF, 785 KB
english, 2005
Conversion to is in progress
Conversion to is failed