A global model for C 4 F 8 plasmas coupling gas phase and wall surface reaction kinetics
Kokkoris, George, Goodyear, Andy, Cooke, Mike, Gogolides, EvangelosVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/19/195211
Date:
October, 2008
File:
PDF, 249 KB
english, 2008