Effect of gate capping configurations and...

Effect of gate capping configurations and silicon-on-insulator thickness with external stresses on partially depleted metal-oxide-semiconductor field-effect transistors

Chang, Wen-Teng, Lin, Jian-An, Wang, Chih-Chung, Yeh, Wen-Kuan
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3534008
File:
PDF, 874 KB
english, 2011
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