![](/img/cover-not-exists.png)
[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Design of Alignment System for Overlaying in Scanning Probe Lithographic Technology and Analyses of Alignment Precision
Li, Xiao-Na., Li. Han,, Gu, Wen-Qi.Year:
2006
Language:
english
DOI:
10.1109/nems.2006.334808
File:
PDF, 4.92 MB
english, 2006