Equilibrium constant of segregation-induced Fe gettered by...

Equilibrium constant of segregation-induced Fe gettered by heavy boron doping in Si

Tobe, Satoshi, Hayamizu, Yoshinori, Kitagawara, Yutaka
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Volume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368195
File:
PDF, 487 KB
english, 1998
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