Equilibrium constant of segregation-induced Fe gettered by heavy boron doping in Si
Tobe, Satoshi, Hayamizu, Yoshinori, Kitagawara, YutakaVolume:
84
Year:
1998
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.368195
File:
PDF, 487 KB
english, 1998