Etch Characteristics of Pt Using Cl[sub 2]/Ar/O[sub 2] Gas...

Journal of The Electrochemical Society 2000 Vol. 147; Iss. 5

Etch Characteristics of Pt Using Cl[sub 2]/Ar/O[sub 2] Gas Mixtures

Kwon, Kwang-Ho, Kang, Seung-Youl, Yeom, Geun-Young, Hong, Nam-Kwan, Lee, Jin Ho
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Volume:
147
Year:
2000
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1393438
File:
PDF, 183 KB
english, 2000
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