The analysis of background gas heating in direct current...

Journal of Applied Physics 1997 Vol. 82; Iss. 12

The analysis of background gas heating in direct current sputtering discharges via particle simulation

Serikov, Vladimir V., Nanbu, Kenichi
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Volume:
82
Year:
1997
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.366497
File:
PDF, 478 KB
english, 1997
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