Photopatternable inorganic hardmask

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Photopatternable inorganic hardmask

A. Telecky, P. Xie, J. Stowers, A. Grenville, B. Smith, D. A. Keszler
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Year:
2010
Language:
english
DOI:
10.1116/1.3507889
File:
PDF, 519 KB
english, 2010
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