Selective lateral dry etching of GaAs in AlGaAs/GaAs...

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Selective lateral dry etching of GaAs in AlGaAs/GaAs heterostructures with CCl2F2/He

M. Walther, G. Tränkle, T. Röhr, G. Weimann
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Year:
1992
Language:
english
DOI:
10.1063/1.351639
File:
PDF, 605 KB
english, 1992
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