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[IEEE 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Cannizzaro, Catania, Italy (2007.10.2-2007.10.5)] 2007 15th International Conference on Advanced Thermal Processing of Semiconductors - Bi-Directional Reflectivity of Surfaces with Anisotropic Roughness on the Wafer Backside
Hsu, Pei-feng, Buchanan, Robert R.Year:
2007
Language:
english
DOI:
10.1109/rtp.2007.4383847
File:
PDF, 637 KB
english, 2007