Variation of composition of sputtered TiN films as a...

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Variation of composition of sputtered TiN films as a function of target nitridation, thermal anneal, and substrate topography

W. Tsai, D. Hodul, T. Sheng, S. Dew, K. Robbie, M. J. Brett, T. Smy
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Year:
1995
Language:
english
DOI:
10.1063/1.114673
File:
PDF, 277 KB
english, 1995
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