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Plasma treatment of porous SiN[sub x]:H films for the fabrication of porous-dense multilayer optical filters with tailored interfaces
R. Vernhes, A. Amassian, J. E. Klemberg-sapieha, L. MartinuYear:
2006
Language:
english
DOI:
10.1063/1.2202692
File:
PDF, 659 KB
english, 2006