The reduction of dislocations in oxygen implanted...

The reduction of dislocations in oxygen implanted silicon-on-insulator layers by sequential implantation and annealing

Hill, Dale, Fraundorf, Phil, Fraundorf, Gail
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Volume:
63
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.340436
File:
PDF, 843 KB
english, 1988
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