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Spatial resistivity distribution of transparent conducting impurity-doped ZnO thin films deposited on substrates by dc magnetron sputtering
Minami, Tadatsugu, Oda, Jun-ichi, Nomoto, Jun-ichi, Miyata, ToshihiroVolume:
28
Year:
2010
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3357284
File:
PDF, 412 KB
english, 2010