Energy deposition of energetic silicon atoms within a silicon lattice
Zecher, P., Wang, D., Rapaport, J., Martoff, C. J., Young, B. A.Volume:
41
Language:
english
Journal:
Physical Review A
DOI:
10.1103/PhysRevA.41.4058
Date:
April, 1990
File:
PDF, 189 KB
english, 1990