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[IEEE 2011 IEEE 11th International Conference on Nanotechnology (IEEE-NANO) - Portland, OR, USA (2011.08.15-2011.08.18)] 2011 11th IEEE International Conference on Nanotechnology - Characterization of silicon nitride films for a silicon nanowire-based biosensor
Daunais, Thomas M., Cheam, Daw Don, Bergstrom, Paul L., Friedrich, Craig R.Year:
2011
Language:
english
DOI:
10.1109/nano.2011.6144608
File:
PDF, 1.82 MB
english, 2011