Spatial profiles of reactive intermediates in rf silane...

Spatial profiles of reactive intermediates in rf silane discharges

Mataras, D., Cavadias, S., Rapakoulias, D.
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Volume:
66
Year:
1989
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.343915
File:
PDF, 938 KB
english, 1989
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