Reactive ion etching of via holes for GaAs high electron...

Reactive ion etching of via holes for GaAs high electron mobility transistors and monolithic microwave integrated circuits using Cl2/BCl3/Ar gas mixtures

Nordheden, K. J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.586515
Date:
September, 1993
File:
PDF, 690 KB
english, 1993
Conversion to is in progress
Conversion to is failed