Realization of autofocusing system for laser direct writing...

Realization of autofocusing system for laser direct writing on non-planar surfaces

Luo, Jianbo, Liang, Yiyong, Yang, Guoguang
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Volume:
83
Year:
2012
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4709407
File:
PDF, 966 KB
english, 2012
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