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Hafnium titanate as a high permittivity gate insulator: Electrical and physical characteristics and thermodynamic stability
Li, Min, Zhang, Zhihong, Campbell, Stephen A., Li, Hong-Jyh, Peterson, Jeff J.Volume:
101
Year:
2007
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2434833
File:
PDF, 1.57 MB
english, 2007