![](/img/cover-not-exists.png)
Grazing incidence x-ray scattering investigation of Si surface patterned with buried dislocation networks
Leroy, F., Eymery, J., Buttard, D., Renaud, G., Lazzari, R., Fournel, F.Volume:
82
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1568545
File:
PDF, 338 KB
english, 2003