Laser annealing of silicon on sapphire
Roulet, M. E., Schwob, P., Affolter, K., Lüthy, W., von Allmen, M., Fallavier, M., Mackowski, J. M., Nicolet, M. A., Thomas, J. P.Volume:
50
Year:
1979
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.326616
File:
PDF, 441 KB
english, 1979