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CO2 laser processing of diffusion induced lattice imperfections in silicon: Experiment and theory
James, R. B., Geist, G. A., Young, R. T., Christie, W. H., Greulich, F. A.Volume:
62
Year:
1987
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.339384
File:
PDF, 924 KB
english, 1987