Controlled formation of atomic step morphology on...

Controlled formation of atomic step morphology on micropatterned Si (100)

Li, K., Pradeep, N., Chikkamaranahalli, S., Stan, G., Attota, R., Fu, J., Silver, R.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3610955
File:
PDF, 948 KB
english, 2011
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