Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Controlled formation of atomic step morphology on micropatterned Si (100)
Li, K., Pradeep, N., Chikkamaranahalli, S., Stan, G., Attota, R., Fu, J., Silver, R.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3610955
File:
PDF, 948 KB
english, 2011