Dislocation network developed in titanium nitride by ion implantation
Perry, Anthony J., Sharkeev, Yuri P., Geist, Daniel E., Fortuna, Sergey V.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581903
File:
PDF, 471 KB
english, 1999