Impact of SOI Thickness on FUSI-Gate CESL CMOS Performance...

IEEE Transactions on Device and Materials Reliability 2011 / 03 Vol. 11; Iss. 1

Impact of SOI Thickness on FUSI-Gate CESL CMOS Performance and Reliability

Chen, Yu-Ting, Chen, Kun-Ming, Yeh, Wen-Kuan, Yuan, Jiann-Shiun, Yeh, Fon-Shan
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Volume:
11
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2010.2072508
Date:
March, 2011
File:
PDF, 759 KB
english, 2011
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