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Observation of surface defects in 6H-SiC wafers
Evwaraye, A. O., Smith, S. R., Skowronski, M., Mitchel, W. C.Volume:
74
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.354269
File:
PDF, 640 KB
english, 1993