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X-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry study of the role of Ti and TiN caps on the cobalt/SiO[sub 2] interface
Conard, T., Kondoh, E., De Witte, H., Maex, K., Vandervorst, W.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581804
File:
PDF, 393 KB
english, 1999