Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Heteroepitaxy of SrTiO[sub 3] thin films on Si (001) using different growth strategies: Toward substratelike quality
Niu, G., Vilquin, B., Penuelas, J., Botella, C., Hollinger, G., Saint-Girons, G.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3609813
File:
PDF, 964 KB
english, 2011