In situ observation of gas reemission and blister rupture...

Applied Physics Letters 2008 Vol. 92; Iss. 5

In situ observation of gas reemission and blister rupture during helium implantation in silicon

Wittmaack, Klaus
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Volume:
92
Year:
2008
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2839601
File:
PDF, 339 KB
english, 2008
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