Growth of Highly -Oriented Crystalline Silicon Thin Films on Molybdenum by Pulsed dc Magnetron Sputtering
Reinig, P., Fenske, F., Schöpke, A., Selle, B., Fuhs, W., Nerding, M., Strunk, Horst P.Volume:
93
Year:
2003
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.93.287
File:
PDF, 468 KB
2003