Nano-Ablation of Inorganic Materials Using Laser Plasma...

Japanese Journal of Applied Physics 2006 / 6 Vol. 45; Iss. 6B

Nano-Ablation of Inorganic Materials Using Laser Plasma Soft X-rays at around 10 nm

Makimura, Tetsuya, Miyamoto, Hisao, Uchida, Satoshi, Fujimori, Takashige, Niino, Hiroyuki, Murakami, Kouichi
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.5545
Date:
June, 2006
File:
PDF, 99 KB
english, 2006
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