The relationship between critical dimension shift and...

The relationship between critical dimension shift and diffusion in negative chemically amplified resist systems

Fedynyshyn, Theodore H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585345
Date:
November, 1991
File:
PDF, 1.00 MB
english, 1991
Conversion to is in progress
Conversion to is failed