Atomic layer deposition temperature dependent minority...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 1

Atomic layer deposition temperature dependent minority carrier generation in ZrO[sub 2]/GeO[sub 2]/Ge capacitors

Bethge, O., Abermann, S., Henkel, C., Smoliner, J., Bertagnolli, E., Straif, C. J., Hutter, H.
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Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3521472
File:
PDF, 1.46 MB
english, 2011
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