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Fabrication of nanometer size photoresist wire patterns with a silver nanocrystal shadowmask
Choi, S. H., Wang, K. L., Leung, M. S., Stupian, G. W., Presser, N., Chung, S. W., Markovich, G., Kim, S. H., Heath, J. R.Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581831
File:
PDF, 543 KB
english, 1999