Fabrication of nanometer size photoresist wire patterns...

Fabrication of nanometer size photoresist wire patterns with a silver nanocrystal shadowmask

Choi, S. H., Wang, K. L., Leung, M. S., Stupian, G. W., Presser, N., Chung, S. W., Markovich, G., Kim, S. H., Heath, J. R.

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Volume:

Year:

1999

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.581831

File:

PDF, 543 KB

english, 1999

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