Mass spectrometric measurements on inductively coupled...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1999 Vol. 17; Iss. 5

Mass spectrometric measurements on inductively coupled fluorocarbon plasmas: Positive ions, radicals and endpoint detection

Li, Xi, Schaepkens, Marc, Oehrlein, Gottlieb S., Ellefson, Robert E., Frees, Louis C., Mueller, Norbert, Korner, Norman
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581980
File:
PDF, 437 KB
english, 1999
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