Effect of pre-amorphization of polycrystalline silicon on...

Journal of Applied Physics 1999 Vol. 86; Iss. 9

Effect of pre-amorphization of polycrystalline silicon on agglomeration of TiSi[sub 2] in subquarter micron Si lines

Bae, Jong-Uk, Sohn, Dong Kyun, Park, Ji-Soo, Lee, Byung Hak, Han, Chang Hee, Park, Jin Won
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Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371523
File:
PDF, 950 KB
english, 1999
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