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[IEEE IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - San Francisco, CA, USA (Dec. 13-15, 2004)] IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. - Highly controllable cyclic selective epitaxial growth (CySEG) for 65nm CMOS technology and beyond
Seung Hwan Lee, Dong Suk ShinYear:
2004
Language:
english
DOI:
10.1109/iedm.2004.1419377
File:
PDF, 323 KB
english, 2004