Dry Etching Mechanisms of ZrO 2 Thin Films in BCl 3 /Cl 2 /Ar Plasma
Lee, Cheol-In, Kim, Gwan-Ha, Kim, Dong-Pyo, Woo, Jong-Chang, Kim, Chang-IlVolume:
384
Language:
english
Journal:
Ferroelectrics
DOI:
10.1080/00150190902892725
Date:
June, 2009
File:
PDF, 3.49 MB
english, 2009