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[IEEE TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - San Francisco, CA, USA (24-27 June 1991)] TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers - Surface micromachined structures fabricated with silicon fusion bonding
Petersen, K., Gee, D., Pourahmade, F., Craddock, R., Brown, J., Christel, L.Year:
1991
DOI:
10.1109/sensor.1991.148895
File:
PDF, 287 KB
1991