Simulation study on the template release mechanism and...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2013 Vol. 31; Iss. 6

Simulation study on the template release mechanism and damage estimation for various release methods in nanoimprint lithography

Shiotsu, Takahiro, Nishikura, Naoki, Yasuda, Masaaki, Kawata, Hiroaki, Hirai, Yoshihiko
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Volume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4832215
File:
PDF, 1.45 MB
english, 2013
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