Effect of resonance in external radio-frequency circuit on...

Effect of resonance in external radio-frequency circuit on very high frequency plasma discharge

Rauf, Shahid, Chen, Zhigang, Collins, Ken
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Volume:
107
Year:
2010
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3406153
File:
PDF, 1022 KB
english, 2010
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