Improved ion source for use with oxygen

Improved ion source for use with oxygen

Guarnieri, C. Richard
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Volume:
6
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.575555
Date:
July, 1988
File:
PDF, 440 KB
english, 1988
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