Integration of Piezoelectric PZT Thin Films with Internal...

Integrated Ferroelectrics 2002 / 01 Vol. 50; Iss. 1

Integration of Piezoelectric PZT Thin Films with Internal Electrodes into an Actuator Structure for MEMS Applications

Hoffmann, M., Leuerer, T., Liedtke, R., Böttger, U., Mokwa, W., Waser, R.
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Volume:
50
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215526
Date:
January, 2002
File:
PDF, 1.21 MB
english, 2002
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