![](/img/cover-not-exists.png)
Integration of Piezoelectric PZT Thin Films with Internal Electrodes into an Actuator Structure for MEMS Applications
Hoffmann, M., Leuerer, T., Liedtke, R., Böttger, U., Mokwa, W., Waser, R.Volume:
50
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215526
Date:
January, 2002
File:
PDF, 1.21 MB
english, 2002