Surface modification and cleaning enhancement of TaSi(N) films with dilute hydrofluoric acid
Mangat, P. J. S., Dauksher, W. J., Whig, R., O’Brien, W. L.Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.582327
File:
PDF, 351 KB
english, 2000