Gettering of metals by voids in silicon

Raineri, V., Fallica, P. G., Percolla, G., Battaglia, A., Barbagallo, M., Campisano, S. U.

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Volume:

Year:

1995

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.359953

File:

PDF, 1.37 MB

english, 1995

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