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Gettering of metals by voids in silicon
Raineri, V., Fallica, P. G., Percolla, G., Battaglia, A., Barbagallo, M., Campisano, S. U.Volume:
78
Year:
1995
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.359953
File:
PDF, 1.37 MB
english, 1995