Epitaxial CoSi2 films on Si(100) by solid-phase reaction
Vantomme, André, Nicolet, Marc-A., Theodore, N. DavidVolume:
75
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.356033
File:
PDF, 2.00 MB
english, 1994