Energy distribution of negative O− and OH− ions emitted...

Journal of Applied Physics 1991 Vol. 70; Iss. 11

Energy distribution of negative O− and OH− ions emitted from YBaCuO and iron garnet targets by dc and rf magnetron sputtering

Krumme, Jens-Peter, Hack, Ron A. A., Raaijmakers, Ivo J. M. M.
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Volume:
70
Year:
1991
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.349848
File:
PDF, 1.86 MB
english, 1991
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